- High purity, specialty gas distribution systems: design, implementation and service support.
- Custom vacuum systems: design and implementation.
- Thin film deposition solutions: design and implementation.
- Label free biosensors: R&D and commercialization. Our leading OWLS™ (Optical Waveguide Lightmode Spectroscopy) and QCM-I™ (Quartz Crystal Microbalance with Impedance Monitoring) technology were acquired by Semilab in December 2024.
MicroVacuum Ltd. was founded in 1987.
Our headquarters and laboratory are located in Budapest, Hungary.
Our main activities include the design and support of high purity, special gas distribution systems; custom vacuum systems. We also provide R&D consultancy for custom development of surface science solutions in various industries and for technologies for special thin film deposition applications.
- Semilab Rt. – Design of oil-free compressed air supply system.
- MOL – Százhalombatta, Instrumental Analytics Laboratory – Design, implementation, and maintenance of a high-purity gas supply system.
- Brooks-Emerson – Design, implementation, and maintenance of a high-purity gas supply system
- Budapest University of Technology and Economics (BME), Department of Electron Devices, Semiconductor Technology Laboratory – Design and implementation of a high-purity gas supply system.
- Government Office of Fejér County, Laboratory Department – Design, implementation, and maintenance of a high-purity gas supply system.
- Institute of Environmental Management, Calibration Laboratory – Design, implementation, and maintenance of a high-purity gas supply system.
- GE-Tungsram Rt. – Design and implementation of a UHV (ultra-high vacuum) system for gas desorption analysis.
- Mirrotron Ltd. – Design and implementation of a ³He (Helium-3) gas recovery system.
Some of the companies and research institutions using the QCM and OWLS technologies developed by us: Roche, Amgen, Nokia Bell Labs, Yale University, BASF, Northwestern University, Oregon State University, University of South Australia, Technical University of Denmark, Cranfield University and many others.