The furnace shown on
the picture consists of a high temperature (1200°C)
furnace with an Al2O3 tube reaction
chamber. The tube is closed at its end with water-cooled
"doors" with "O" rings serving both
as vacuum and overpressure seals as well.
A two-stage rotary vacuum pump with manual valves and N2
purge is used for pumping the reaction chamber down to 10-3
High purity N2, Ar, He gases are introduced into the reaction
tube with manual valves, rotameters.
A pressure gage and a capacitance manometer serve for overpressure
and vacuum measurements.