and build laboratory scale equipments for thin film deposition
The equipments for thin film deposition typically consist
of a reaction chamber (heated, hot wall glass or quartz
tube or cooled metal construction), a vacuum system and
a gas, liquid feeding system. The vacuum and gas delivery
system can be controlled manually with ON/OFF valves and
rotameters or automatically via PC computer with pneumatic
driven valves and electronic Mass Flow Controllers.
The PC computer has a multi-port A/D,D/A card and a software
developed specially for controlling gas and vacuum systems.
Some of the equipments are controlled by PLC.